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ASML Patent Portfolio Analysis

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ASML Patent Portfolio

Disclaimer: 

This report has been updated through 14 November 2025. The information is provided for reference only and does not represent any opinion, recommendation, or endorsement. 

Overview 

ASML Holding N.V. is a Dutch semiconductor equipment manufacturer with a substantial global patent portfolio. Its patents cover lithography, optics, and photonics technologies used in chip production. The portfolio has expanded steadily across major semiconductor markets. 

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Key Metrics:
  • Total Patents: 38,106 
  • Simple Families: 8,412 
  • Extended Families: 7,408 
  • Jurisdictions Covered: 32 
  • Litigated Patents: 25 
  • Challenged Patents: 7 
Asset Status:
  • Active: 21,057 
  • Active Grants: 12,296 
  • Active Applications: 8,761 
  • Inactive: 16,878 Expired: 911 
Jurisdictional Distribution

ASML’s patents span 32 jurisdictions, with the United States and Japan accounting for a significant share of filings. 

Jurisdictional Distribution asml
  • United States (US): 8,123 
  • Japan (JP): 5,248 
  • Taiwan (TW): 4,560 
  • World Intellectual Property Organization (WO): 4,275 
  • China (CN): 4,043 
  • South Korea (KR): 3,858 
  • European Patent Office (EP): 3,132 
  • Netherlands (NL): 1,943 
  • Israel (IL): 768 
  • Singapore (SG): 730 

Total Patents across jurisdictions: 38,106 

Technological Distribution 

Semiconductor technologies account for the majority of ASML’s patents, followed by healthcare, computing systems, and imaging innovations. 

Technological Distribution ASML
  • Semiconductor: 24,525 
  • Healthcare: 4,753 
  • Computer Systems and Components: 2,459 
  • Imaging: 1,106 
  • Software: 979 
  • Industrial: 957 
  • Consumer Electronics: 673 
  • Consumer Goods: 179 
  • Networking: 132 
  • Automotive: 68 
Citations 

Top Citing Assignees (Forward Citations) 

  • ASML Holding N.V. – 6,250 
  • Carl-Zeiss-Stiftung – 1,247 
  • KLA Corporation – 940 
  • Canon Inc. – 884 
  • Nikon Corporation – 873 
  • Samsung Electronics Co. Ltd. – 823 
  • Taiwan Semiconductor Manufacturing Company Limited – 670 
  • Applied Materials Incorporated – 496 
  • Komatsu Ltd. – 459 
  • International Business Machines Corporation – 291 

Top Cited Assignees (Backward Citations) 

  • ASML Holding N.V. – 14,824 
  • Nikon Corporation – 6,538 
  • Canon Inc. – 5,415 
  • Hitachi, Ltd. – 3,115 
  • KLA Corporation – 3,013 
  • Carl-Zeiss-Stiftung – 3,008 
  • Toshiba Corporation – 2,320 
  • Applied Materials Incorporated – 2,269 
  • Taiwan Semiconductor Manufacturing Company Limited – 1,567 
  • Tokyo Electron Limited – 1,524 

Top Cited Patents 

  • US5969441A – 1,376 citations 
  • US6208407B1 – 878 citations 
  • US6952253B2 – 861 citations 
  • WO2004057589A1 – 764 citations 
  • US6778257B2 – 736 citations 
  • US6603130B1 – 732 citations 
  • WO2009078708A1 – 624 citations 
  • US6046792A – 619 citations 
  • WO2009106279A1 – 585 citations 
  • US6262796B1 – 549 citations 

Top Citing Patents 

  • US11669021B2 – 450 backward citations 
  • US11275316B2 – 444 backward citations 
  • US10761433B2 – 430 backward citations 
  • US10222711B2 – 416 backward citations 
  • US9851644B2 – 415 backward citations 
  • US9436096B2 – 412 backward citations 
  • US8947631B2 – 410 backward citations 
  • US8941810B2 – 409 backward citations 
  • US10678139B2 – 402 backward citations 
  • US10180629B2 – 399 backward citations 
Litigation Activities 

ASML has been involved in limited litigation over the years, primarily related to patent disputes in the semiconductor equipment industry. Activity has been modest and concentrated in a few key years. 

Litigation Activity by Filing Year 

  • Early activity in 2000–2001, with 8 litigated patents. 
  • Renewed cases in 2017–2018, involving 15 litigated patents. 

Top Plaintiffs 

  • ASML Holding N.V. – 4 (Operating Company) 
  • SVC Lithography Systems Incorporated – 1 
  • Carl-Zeiss-Stiftung – 1 
  • Kohlberg & Company LLC – 1 

Top Defendants 

  • Nikon Corporation – 3 
  • Synopsys Incorporated – 1 
  • Veeco Instruments Incorporated – 1 
  • ASML Holding N.V. – 1 

Top Venues 

  • District of Massachusetts (D. Mass.) – 2 
  • Northern District of California (N.D. Cal.) – 2 
  • Central District of California (C.D. Cal.) – 1 
  • District of Columbia (D.D.C.) – 1 

Ownership and Acquisition 

Ownership Type 

  • Acquired Patents: 1,258 
  • Originally Assigned Patents: 36,848 

Sources of Acquired Patents 

  • Operating Companies: 873 
  • NPEs: 35 
  • Universities: 6 
  • Other Sources: 68 

ASML’s portfolio is predominantly in-house developed, with a small share of acquired patents mainly from operating companies in semiconductor and precision optics fields. 

Patenting Activity by Estimated Expiration Year 
Technological Distribution ASML
Patenting Activity by Publication/Issue Year 
Activity by Publication asml
Notable Acquisitions and M&A 
  • 2016 – Hermes Microvision (US$3.1 B) 
    Acquisition of Taiwan-based HMI to integrate e-beam inspection and metrology tools with ASML’s lithography systems. 
  • 2012 – Cymer (US$2.5 B) 
    Acquisition of Cymer to internalize critical light source technology essential for EUV lithography. 
  • 2001 – Silicon Valley Group (US$1.6 B) 
    Purchase of SVG expanded ASML’s U.S. footprint and stepper technology portfolio. 
Business Performance 

ASML Holding N.V. (Ticker: ASML) publishes full annual and quarterly financials. 

  • FY 2024 net sales were €28.3 billion, with net income of €7.6 billion, reflecting steady demand across semiconductor segments. (Source: GlobeNewswire) 
  • The FY 2024 gross margin stood at 51.3 %, consistent with ASML’s long-term profitability range. 
    (Source: ASML Annual Report 2024) 
  • Q1 2025 results showed net sales of €7.7 billion, a 54.0 % gross margin, and net income of €2.4 billion, indicating strong operational performance early in the year. 
    (Source: ASML Investor Relations) 
  • For FY 2025, ASML projects total revenue between €30 billion and €35 billion with a gross margin of 51–53 %, supported by EUV system shipments and customer capacity expansion. 
    (Source: GlobeNewswire) 
Headquarters 

ASML Holding N.V. 
De Run 6501, 5504 DR Veldhoven, The Netherlands 
Registered in the Netherlands – Chamber of Commerce No. 17085815 
 

Conclusion

 

ASML’s patent portfolio includes over 38,000 assets across 32 jurisdictions, covering lithography, optics, and photonics technologies central to chip manufacturing. Most patents are internally developed, complemented by key acquisitions of technology suppliers such as Cymer, SVG, and HMI. Litigation activity remains minimal relative to portfolio size. 

Financially, ASML continues to report strong margins and revenue growth supported by expanding EUV adoption and semiconductor demand worldwide. The company’s IP holdings align closely with its manufacturing leadership in advanced lithography systems. 

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